Rendering

Component: (Network and Table)
Network
40701 - Disclosure - Inventories, net - Components (Details)
(http://www.axcelis.com/role/DisclosureInventoriesNetComponentsDetails)
Table(Implied)
Slicers (applies to each fact value in each table cell)
Reporting Entity [Axis]0001113232 (http://www.sec.gov/CIK)
Inventories, netPeriod [Axis]
2016-12-31
2015-12-31
Inventories, net
 
 
Raw materials
80,503,000  
72,070,000  
Work in process
14,117,000  
29,219,000  
Finished goods (completed systems)
19,233,000  
8,119,000  
Inventories, net
113,853,000  
 
109,408,000